| 摘要 |
PURPOSE:To perform a high accuracy inspection by simultaneously applying signals with equal magnitude and phase to a circuit corresponding to each phase of each terminal and, as a result, by detecting the difference between respective phases. CONSTITUTION:When an inspection start command is given, inspection current signals with equal magnitude and phase are applied to each-phase terminals and detected by a detector. Each-phase difference current values idRm, idSm, idTm are computed from detected signals, and respective mutual differences IdRS, IdST, IdTR between these phases are computed and judged to be abnormal at the time of exceeding an allowable value epsilon0. With reference to R-phase being a representative phase, the difference current IdR for the period of time T, during which an inspection input is applied, is judged to be abnormal at the time of not satisfying the formula (1) when ITS is an inspection current and k is a constant. |
