发明名称 |
Method for manufacturing information recording medium |
摘要 |
An information recording medium is manufactured while placing, in a reaction region, a substrate on the surface of which is recorded information in the form of an indented pattern and the surface of which exhibits electrical conductivity. A plasma generating gas is introduced into a plasma generating region which is isolated from the reaction region. The plasma generating gas is activated by microwaves to generate a plasma. The plasma from the plasma generating region and an organic monomer are introduced into the reaction region independently of each other to initiate polymerization of the organic monomer. A dielectric layer of a polymer of the monomer and of a uniform, small thickness is formed along the indented pattern of the target.
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申请公布号 |
US4395435(A) |
申请公布日期 |
1983.07.26 |
申请号 |
US19820355114 |
申请日期 |
1982.03.05 |
申请人 |
TOKYO SHIBAURA DENKI KABUSHIKI KAISHA |
发明人 |
SANPEI, HIDEO;MATSUNO, KUNIO;HIRANO, SHYOJI;KUMAGAI, KATUYA |
分类号 |
C23C16/00;G11B9/06 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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