| 摘要 |
<p>PURPOSE:To obtain a transfer device which can transfer semiconductor wafers by bringing the centroids of semiconductor wafers into coincidence by providing centroid detection means for movement and control in 3-dimensional directions on the basis of gravity information of a pressure sensor, and transfer means for transferring the centroid of the wafer to the rotation center of a rotary stage. CONSTITUTION:Pressure sensors 43 are so disposed at an equal interval on a raising body 42 as to be located at the vertexes of a regular triangle, received by the gravity of a semiconductor wafer 30 upon rising of the body 42, this gravity information is converted to an electric signal or the like and output. A moving shaft 41 is so displaced that its raising center coincides with the centroid of the wafer 30 on the basis of the gravity information from the sensors 43. A fork 51 is so operated as to transfer the wafer 30 detected at its centroid from the body 42 to a rotary stage 2. Accordingly, after the detected centroid of the wafer 30 is brought into coincidence with the rotation center of the stage 2, the wafer 30 is transferred onto the stage 2.</p> |
