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发明名称
WORKING METHOD FOR SILICON NITRIDE INSULATING FILM
摘要
申请公布号
JPH0212915(A)
申请公布日期
1990.01.17
申请号
JP19880164487
申请日期
1988.06.30
申请人
SHARP CORP
发明人
KUROTOBI MAKOTO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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