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发明名称
PARTICLE DETECTION METHOD AND APPARATUS
摘要
申请公布号
EP0265229(A3)
申请公布日期
1990.01.17
申请号
EP19870309266
申请日期
1987.10.20
申请人
INSPEX INCORPORATED
发明人
ALLEMAND, CHARLY;MALDARI, MARIO A.;IIDA, HITOSHI
分类号
H01L21/66;G01N15/02;G01N21/88;G01N21/94;G01N21/956;(IPC1-7):G01N21/88;G01N21/47
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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