COMPACT X-Y STAGE,申请号JP19880162193-传众专利搜索

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发明名称	COMPACT X-Y STAGE
摘要
申请公布号	JPH0210291(A)	申请公布日期	1990.01.16
申请号	JP19880162193	申请日期	1988.06.29
申请人	FUJITSU LTD	发明人	SAKATA YUJI;TABATA FUMIO;SEKIGUCHI HIDENORI;KAMATA TORU
分类号	G12B5/00	主分类号	G12B5/00
代理机构		代理人
主权项
地址

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