| 摘要 |
PURPOSE:To realize a high speed response, and also laser beam machining with high accuracy by converting and enlarging a direct-acting displacement of a piezoelectric actuator to a rotational displacement and driving a polarizing mirror to be rotated. CONSTITUTION:A scanner device is constituted of a polarizing mirror 1, a ball screw 2 being a displacement enlarging mechanism and a direct-acting rotation converting mechanism, a piezoelectric actuator 3, a position sensor 4 and a controller 20. The piezoelectric actuator 3 generates a direct-acting displacement by a command signal from the controller 20. The ball screw 2 converts a directing displacement of the piezoelectric actuator 3 to a rotational displacement, and also, enlarges it, and when the piezoelectric actuator 3 is displaced in the A direction, a shaft 7 is rotated. Also, the shaft 7 is coupled to the rotary shaft 13 of the polarizing mirror 1, and by the rotation of the polarizing mirror 1, a laser beam is brought to polarizing scan. Moreover, on an input stage of a control circuit 23, a high frequency signal generator 30 is provided so that a high frequency AC signal is superposed on a common signal and generating a microvibration in a driving force transfer part, statical friction is eliminated and a transfer torque loss is reduced. |
