INDUCTANCE DISTRIBUTION RF EXCITING TYPE WAVEGUIDE GAS LASER APPARATUS

摘要

PURPOSE: To reduce the height and to decrease the number of components by connecting an inductor coil with first and second electrodes and inducing an inductance in a coil connected in parallel with a capacitance. CONSTITUTION: Marginal parts 34, 35 of a distributed inductor member 29 constitute a current conduction rail extending in the longitudinal direction of a laser 10 wherein the member 29 includes a plurality of inductance coils 40 wound in the opposite directions. It has a free end 41 connected with a pin 42 which is connected with a hot electrode 27. The electrode 27 is fed with an AC current having frequency in radio frequency range spectrum. Consequently, the electrode 27 forms a capacitance in conjunction with the bottom 15 of housing 11 or a protruding part 30 thereof and laser pumping takes place in the channel 25 of a waveguide plate 24. According to the arrangement, the number of components is decreased and a discharge pumping can be produced uniformly in a waveguide laser cavity having a length longer than a quarter of pumping wavelength.