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发明名称
ION IMPLANTER
摘要
申请公布号
JPH0210642(A)
申请公布日期
1990.01.16
申请号
JP19880160245
申请日期
1988.06.27
申请人
TERU BARIAN KK
发明人
HORIUCHI TAKASHI;NAKADA TETSUO
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
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