| 摘要 |
PURPOSE:To easily and exactly detect a fitting error by measuring a radiated beam displacement quantity, while varying the operation quantity of a movable part, and deriving the fitting error of a beam direction converting element, based on its value and a relational expression. CONSTITUTION:In a movable beam radiating mechanism RB which has a hollow movable arm mechanism in which plural hollow arms AM1-AM5 are connected successively by a prescribed number of movable parts 1-5, and irradiates a desired object by a beam LB as radiated beam LB from the tip arm AM5 side through the inside of the hollow movable arm mechanism, while converting it successively by a prescribed number of mirrors m1-m9 attached to the inside of the hollow movable arm mechanism from a prescribed part 13, the dependency of the beam displacement quantity of the radiating beam LB to the fitting error quantity of the mirrors m1-m5 and the operation quantity of the movable parts 1-5 is derived and specified in a form of a relational expression. Subsequently, by measuring the beam displacement quantity, while specifying the operation quantity, a combination of concrete values is derived. Next, based on a value of the combination and the relational expression, a concrete value of the fitting error of the mirrors m1-m5 is derived. |
