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发明名称
REMOVAL OF SPONTANEOUS OXIDE FILM ON SURFACE OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH0210726(A)
申请公布日期
1990.01.16
申请号
JP19880162092
申请日期
1988.06.28
申请人
FUJITSU LTD
发明人
SUGINO SHIGEJI
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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