| 摘要 |
PURPOSE:To reduce stray electrons and change energy resolution by providing partition plates each having a hole through which only electrons to be analyzed can pass at the center position between a light source and the convergence point on the orbit with the minimum aberration, dividing an analyzer at this position, and making this relative position variable. CONSTITUTION:The orbit of charged particles to be analyzed is made nearly parallel with two parallel electrodes of an analyzer at the center position between an electronic optical light source and the convergence point 14 in the analyzer. When partition plates 9 each having a hole through which only charged particles to be analyzed can pass are provided, noise component electrons such as scattered electrons generated by the collision of charged particles with sufficiently different energy from charged particles to be analyzed with an electrode can be removed. The analyzer is divided at the position of the partition plates 9, which are arranged so that orbits with the minimum aberration in divided analyzers match each other and the relative distance is made variable, thereby charged particles in the orbit with a displaced angle can be selected according to the distance. The energy resolution of the analyzer can be changed. |
