| 摘要 |
A monolithic thermal ink jet printhead is presented. This monolithic structure makes page-width array thermal ink jet printheads possible. The monolithic structure can be manufactured by standard integrated circuit and printed circuit processing techniques. A nickel-plating process constructs a nozzle on top of resistors, thereby eliminating adhesion and alignment problems. A rigid substrate supports a flexible cantilever beam upon which the resistors are constructed. The cantilever beam, together with the ink itself, buffers the impact of cavitation forces during bubble collapsing and results in a better resistor reliablility. The monolithic printhead allows a smoother ink supply since the ink is fed directly from the backside to the resistor through an opening in the rigid substrate. The orifice structure is constructed by a self-aligned, two-step plating process which results in compound bore shape nozzles.
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