| 摘要 |
PURPOSE:To perform a simultaneous electrical charging for fine particles and a disinfection of micro-organism and the like effectively by a method wherein an ultra-violet rays having its major wave length of predetermined range is radiated. CONSTITUTION:At a clean ventilation device 11, air with a degree of cleanliness of 10,000 within a clean room 1 is sucked by a fan 8 and some fine particles in the air are electrically charged with photo-electrons generated under a radiation of ultra-violet rays onto a photo-electric emission member 21 and at the same time some micro-organism such as virus and the like are disinfected by an ultra-violet rays energy, thereafter the fine particles electrically charged are removed through a filter 10. In this way, a location on the working table 13 is kept at a high degree of cleanliness. That is, a voltage is applied between electrodes 20 and a photo-electric emission member 21 form a voltage supplying part 8, and an ultra-violet rays is radiated against the emission member 21. Air 50 is passed between the electrodes 20 and the emission member 21 to cause some fine particles within the air 50 to be efficiently electrically charged. At this time, as a major wave length of the ultra-violet rays, a wave length of 200 to 360mm is applied and then both electrical charging action and a disinfecting action for the fine particles are simultaneously and efficiently carried out. |
