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经营范围
发明名称
VACUUM PROCESSOR
摘要
申请公布号
JPH029120(A)
申请公布日期
1990.01.12
申请号
JP19880160315
申请日期
1988.06.28
申请人
TOKUDA SEISAKUSHO LTD
发明人
IWAMI MUNENORI;TEZUKA MASASHI
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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