| 摘要 |
<p>PURPOSE:To prevent unrefined fluids from being discharged in an exhaust gas treatment apparatus of starting gas for processing semiconductor by, while by-passing a desired refiner selected from a plurality of refiners, passing fluids through other refiners in series. CONSTITUTION:An exhaust gas treatment apparatus I includes packed cylinders (refiner) 22a-22c filled with packing materials 21-21c respectively. For example, when the packed cylinders 22a, 22b are in operation in series, valves 25a, 27a, 26b are opened and other valves are closed so that harmful gases discharged from a processing apparatus of semiconductor, etc., are taken in from an intake port 23 and discharged from a discharge port 24. And when treating capacity of the packed cylinder 22a has fallen, valves 27b, 26c, 25b are opened and valves 25a, 27a, 26b are closed so that the packed cylinders 22b, 22c are put into operation in series, while the packed cylinder 22a is regenerated. In this manner, rescattering of the harmful gases and the like is avoided and packing materials can be effectively utilized.</p> |
