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发明名称
PRODUCTION OF SINGLE CRYSTAL
摘要
申请公布号
JPH029790(A)
申请公布日期
1990.01.12
申请号
JP19880162103
申请日期
1988.06.28
申请人
OSAKA TITANIUM CO LTD;KYUSHU ELECTRON METAL CO LTD
发明人
KAJIMOTO TSUTOMU;AKASHI YOSHIHIRO;HORIE DAIZO;SAKURADA SHINICHI
分类号
C30B15/02;C30B15/10;C30B29/06;H01L21/208
主分类号
C30B15/02
代理机构
代理人
主权项
地址
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