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发明名称
DRY ETCHING
摘要
申请公布号
JPH027424(A)
申请公布日期
1990.01.11
申请号
JP19880157627
申请日期
1988.06.24
申请人
TOKYO ELECTRON LTD
发明人
SHIMIZU MASAHIRO;HIROSE KEIZO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
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代理人
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