| 摘要 |
PURPOSE:To stabilize output by eliminating effect of impulse wave produced during discharge without preventing flow of gas laser medium by using the impulse wave. CONSTITUTION:Gas laser medium contained within an airtight container 1 is fed from a side of an air duct 7a to a discharge space of a main discharge electrode through an air blower 9 and circulates. A protection plate 10 is supported by a shaft 11 adjacent to the main discharge electrode 5 inside the air duct 7a and installed to rotate freely. The protection plate 10 stops at a position II during and before/after main discharge, and impulse wave generated during discharge collides against the protection plate 10 and an action of forcing back the flow of gas laser medium is prevented. Moreover, the impulse wave reflects from a recessed section 12 and works to allow gas laser medium to flow readily to a side of the main discharge electrode, that is, to a downstream side. While the protection plate 10 remains at the position II, the gas laser medium passes through a bypass 30 formed by the protection plate 10 and an auxiliary air duct 17 and a through hole 13 which is shaped on the protection plate 10, and then fed to a discharge space of the main discharge electrode. Flow of gas laser demium is not prevented at all. |
