| 摘要 |
<p>PURPOSE:To minimize the number of the absolute types on a control by controlling for the type and processing channel of the work piece with a preservation shelf provided at the front step of a facility module. CONSTITUTION:An identifying device 2 is placed on the rear step of a preservation shelf 1a, identifies the type, process sequence, processing data, etc., of the conveyed wafer and sends them to the in-process shelf corresponding to the necessary facility module or a next process (preservation shelf 1b). In-process shelves 3a-3n has a function to temporarily make in-process of a wafer in the sequence of the type and the process and is placed at the front step of respectively corresponding facility modules 4a-4n. The facility modules 4a-4n are composed of facilities 5a-5e and 5x-5z so as to form respectively a certain special processing mode. At the rear step, in order to write the process sequence and the processing data by the said module into a writable and readable data holding card 8 of the data, data writing devices 6a-6n are arranged.</p> |
