JOSEPHSON-TUNNELELEMENT MI METALLOXIDISCHEM SUPRALEITERMATERIAL UND VERFAHREN ZUR HERSTELLUNG DES ELEMENTS

摘要

A Josephson tunnel element (15) with a sandwich structure on a substrate (2) contains a film (7) which serves as a basis electrode (BE), a film (12) which serves as a counter electrode (GE), and a film (10) which serves as a tunnel barrier sandwiched between said electrode films. The electrode films (7, 12) are each composed of an oxide ceramic superconducting material with a high transition temperature and ordered crystal structure, so that the electrode films (7, 12) have a high critical current density in the direction of the planes (E1, E2) of the films. Both the tunnel barrier film (10) and the substrate (2) have a texture (2a) adapted to the crystal structure dimensions of the superconducting phase of the superconducting material. A Josephson element of this type can be advantageously manufactured by a hole-masking technique by oblique sputtering concurrently with heat treatment and oxygen treatment.