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发明名称
FORMATION OF COMPOUND SEMICONDUCTOR CRYSTAL THIN FILM
摘要
申请公布号
JPH027418(A)
申请公布日期
1990.01.11
申请号
JP19880157623
申请日期
1988.06.24
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
SHIBATA TOMOHIRO;NANISHI YASUYUKI;KONDO NAOTO
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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