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发明名称
PROCESS OF MATCHING AND MANUFACTURE OF COLUMN
摘要
申请公布号
JPH027544(A)
申请公布日期
1990.01.11
申请号
JP19890045000
申请日期
1989.02.23
申请人
TEXAS INSTR INC <TI>
发明人
JIEFUREI II BURAITON
分类号
H01L21/3213;H01L21/768
主分类号
H01L21/3213
代理机构
代理人
主权项
地址
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