Adjusting device and method for adjusting a robot arm for use in automated production areas, in particular in semiconductor technology

摘要

The adjusting device and the adjusting method are provided in order to be able to carry out a metrologically determinable, reliably reproducible adjustment of the displacement of a robot arm. The adjusting device has a plurality of dial gauges (33) for measuring height differences and can be fixed to the robot arm (1). For adjustment, following zero point adjustment of the dial gauges (33), the robot arm (1) together with the adjusting device fixed thereto is positioned on that part of the apparatus arrangement relative to which it is to be adjusted. At the same time, the distance and inclination of the robot arm (1) are set such that the dial gauges (33) display preset values. The adjusting device and the method can be employed in particular for adjusting a robot arm (1) which is used to move semiconductor wafers (3) in a plasma etching installation. <IMAGE>