| 摘要 |
PURPOSE:To easily produce the superfine powder of metal and ceramic which has been extremely difficult to produce by the conventional vapor-phase thermochemical reaction process by holding the inside of a reactor wherein a vapor-phase reaction proceeds at a reduced pressure. CONSTITUTION:The superfine powder of metal or ceramic is produced by the vapor-phase thermochemical reaction process between a volatile metallic compd. 17 (e.g., cuprous chloride) and a gas 1 (e.g., hydrogen) capable of reacting with the compd. In this case, the inside of the reactor 8 wherein the vapor-phase reaction process proceeds is held at 500-50 Torr. A multistage superfine powder recovery device 11 having a fine filter and a liq.-sealed vacuum pump 12 using a liq. inert to the gaseous reactant of the thermochemical reaction or absorbing the gaseous reactant are provided at the final stage. As a result, the superfine powder of metal and ceramic, which has been extremely difficult to produce by the conventional vapor-phase thermochemical reaction process, can be easily produced. |
