发明名称 SEMICONDUCTOR ELEMENT
摘要 PURPOSE:To smoothly correspond to a bonding tool by increasing the lengths of a pair of sides parallel to the corner sides of the chip of a pad as approaching the corner of the chip. CONSTITUTION:A plurality of pads 2 arranged at a suitable interval inside the periphery of a chip 1 are increased in the lengths of a pair of sides parallel to the corner of the chip 1 toward the corner of the chip 1. When the two sides parallel to the side of the corner of the chip of the pads 2 are increased in length toward the corner, its bonding position can be so deviated as to satisfy a bonding tool so as to bond the pads 2 to wirings 4. That is, the degree of freedoms of bonding can be improved. Thus, the correspondence to the tool can be smoothened.
申请公布号 JPH025442(A) 申请公布日期 1990.01.10
申请号 JP19880154775 申请日期 1988.06.24
申请人 HITACHI LTD;HITACHI MICRO COMPUT ENG LTD 发明人 YOSHIDA MAKOTO
分类号 H01L21/60 主分类号 H01L21/60
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