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经营范围
发明名称
EXCHANGE OF ION SOURCE IN ION IMPLANTER
摘要
申请公布号
JPH025330(A)
申请公布日期
1990.01.10
申请号
JP19880155863
申请日期
1988.06.23
申请人
TOKYO ELECTRON LTD
发明人
KAWASAKI MASAYOSHI
分类号
H01J27/02;H01J27/08;H01J37/08;H01J37/317
主分类号
H01J27/02
代理机构
代理人
主权项
地址
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