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发明名称
ION IMPLANTER
摘要
申请公布号
JPH025350(A)
申请公布日期
1990.01.10
申请号
JP19880152625
申请日期
1988.06.20
申请人
SHIMADZU CORP
发明人
KAIMOTO AKIRA
分类号
H01J37/244;H01J37/317;H01L21/265
主分类号
H01J37/244
代理机构
代理人
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