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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH025548(A)
申请公布日期
1990.01.10
申请号
JP19880157322
申请日期
1988.06.24
申请人
NEC CORP
发明人
WAKABAYASHI HIROYUKI
分类号
H01L21/761;H01L21/76
主分类号
H01L21/761
代理机构
代理人
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