| 摘要 |
PURPOSE:To reduce the weight, kind of parts, and cost of a gas laser device by connecting a discharge tube, air blower, and heat exchanger with each other by means of resin-made pipes through which a laser gas is made to flow, with the inner surfaces that are exposed to the laser gas being coated with metallic thin films. CONSTITUTION:A discharge tube 1, air blower 9, and heat exchanger 10 are connected with each other by means of pipes through which a laser gas is made to flow and pipes which are made of a resin and the inner surfaces of which that are exposed to the laser gas are coated with metallic thin films are used for the pipes. For example, a cross 16, tee 17, elbows 180-183, and straight pipes 190-198, all of which are piping parts, are constituted of such resin pipes. When such resin pipes are used for the gas piping, the weight and cost of this gas laser device can be reduced and, since the inner surfaces of the pipes exposed to the laser gas are coated with the metallic thin films, the drawback arising from being made of resin have can be eliminated. |
