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发明名称
ALARM AND CONTROL SYSTEM FOR SEMICONDUCTOR MANUFACTURING PLANTS
摘要
申请公布号
EP0112491(B1)
申请公布日期
1990.01.10
申请号
EP19830111571
申请日期
1983.11.19
申请人
NOHMI BOSAI KOGYO CO., LTD.
发明人
KIMURA, SHOICHI C/O NOHMI BOSAI KOGYO CO., LTD.
分类号
G08B17/00;A62C3/00;G08B17/117
主分类号
G08B17/00
代理机构
代理人
主权项
地址
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