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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH025545(A)
申请公布日期
1990.01.10
申请号
JP19880157299
申请日期
1988.06.24
申请人
NEC CORP
发明人
KURIYAMA TOSHIHIDE;HAMAGUCHI TSUNEO
分类号
H01L21/762;H01L21/76;H01L29/78;H01L29/786
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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