| 摘要 |
In accordance with the present invention a microdevice 10 is set forth for gas sensing. The microdevice 10 includes a conductive substrate 12 having an insulator layer 14 on a surface 16 thereof, the insulator layer 14 having an opening 18 therethrough exposing a portion 20 of the surface 16. A conducting member 22 is in contact with the insulator layer 14. The member 22, the insulator layer 14 and the portion 20 of the surface 16 define an ionization chamber 28. Gas can flow through the ionization chamber 28. A potential difference is applied between the substrate 12 and the member 22. The current flowing between the substrate 12 and the member 22 is measured. A microdevice 10 as disclosed herein uses very little power and has very high sensitivity.
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