Method of manufacturing a semiconductor device,申请号US19880290921-传众专利搜索

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发明名称	Method of manufacturing a semiconductor device
摘要
申请公布号	US4892843(A)	申请公布日期	1990.01.09
申请号	US19880290921	申请日期	1988.12.28
申请人	U.S. PHILIPS CORPORATION	发明人	SCHMITZ, JOHANNES E. J.;VAN DIJK, ANTONIUS J. M.;ELLWANGER, RUSSELL C.
分类号	C23C16/14;H01L21/28;H01L21/285;H01L21/3205;H01L21/768;H01L23/52;H01L23/532	主分类号	C23C16/14
代理机构		代理人
主权项
地址

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