| 摘要 |
PURPOSE:To prevent pollution of underground water by adding a chlorofluorohydrocarbon composed of 3 carbon atoms as an effective component. CONSTITUTION:The chlorofluorohydrocarbon composed of 3 carbon atoms is contained as an effective component in the developer. It is preferred to use one of 1,1-dichloro-2,2,3,3,3-pentafluoropropane (boiling point 45.5 deg.C), 1,3- dichloro-1,2,2,3,3-pentafluoropropane (boiling point 52 deg.C), and the like H- containing chlorofluorohydrocarbons, or a mixture of >=2 of them, and at least one of hydrocarbons, alcohols, ketones, chlorinated hydrocarbons, and esters is contained in the resist developer, thus permitting the resist developer to be obtained in place of the chlorinated resist developers unfavorable from the view point of polluting underground water. |
