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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH023916(A)
申请公布日期
1990.01.09
申请号
JP19880153789
申请日期
1988.06.22
申请人
SONY CORP
发明人
GOMI TAKAYUKI;SASAKI HIROMI
分类号
H01L29/73;H01L21/265;H01L21/331;H01L29/72
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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