发明名称 Processes involving lithographic materials
摘要 Extremely useful compositions for delineation of materials utilized in device applications have been found. These compositions include a polymer having segments that are at least 10 monomer units long of a first entity and segments again at least 10 monomer units long of a second entity. The monomer units are chosen so that each segment type provides a specific chemical characteristic to the polymer.
申请公布号 US4892617(A) 申请公布日期 1990.01.09
申请号 US19870110630 申请日期 1987.10.19
申请人 AMERICAN TELEPHONE & TELEGRAPH COMPANY, AT&T BELL LABORATORIES 发明人 BATES, FRANK S.;HARTNEY, MARK A.;NOVEMBRE, ANTHONY E.
分类号 G03F7/038;G03F7/075 主分类号 G03F7/038
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