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经营范围
发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH024966(A)
申请公布日期
1990.01.09
申请号
JP19880146515
申请日期
1988.06.13
申请人
FUJITSU LTD
发明人
IWAMA RYUJI
分类号
C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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