CHARGED BEAM LITHOGRAPHY EQUIPMENT,申请号JP19880144838-传众专利搜索

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发明名称	CHARGED BEAM LITHOGRAPHY EQUIPMENT
摘要
申请公布号	JPH022111(A)	申请公布日期	1990.01.08
申请号	JP19880144838	申请日期	1988.06.14
申请人	TOSHIBA CORP;TOSHIBA MACH CO LTD	发明人	TAWARA CHUJI;GOTO MINEO;MUNAKATA YASUO;ASANUMA NOBUTOSHI
分类号	H01L21/027;H01L21/30	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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