| 摘要 |
PURPOSE:To inhibit aggravation of operational environment due to elevation of room temp. and to reduce energy cost during processing by utilizing waste heat of steam generated by the heating of waste liquid to be processed for the drying of a sensitive material. CONSTITUTION:Waste liquid generated by the processing of a sensitive material(e.g. PS plate) is transported to an evaporator 10 in a waste liquid processing part 2, and heated by a heating member 17, thus solid matters are separated from evaporated vapor. Then the vapor is guided to an air-cooling cooler 22 and liquefied by cooling, and the waste heat is used for production of hot feed air by sending it to a drying part 6 of the sensitive material after controlling its temp. by using a heater 29 in a duct 25 in combination. Liquefied water is collected in a recovering vessel 24 and used as diluting water for concentrated developing soln., etc. The sludge which generates in the evaporator 10 is collected in a sludge tank 16. |
