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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH022136(A)
申请公布日期
1990.01.08
申请号
JP19880144647
申请日期
1988.06.14
申请人
FUJITSU LTD
发明人
NISHIDA KENJI
分类号
H01L29/78;H01L21/225;H01L21/28;H01L21/336
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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