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发明名称
LSI AUTOMATIC WIRING METHOD
摘要
申请公布号
JPH021953(A)
申请公布日期
1990.01.08
申请号
JP19880142258
申请日期
1988.06.09
申请人
MITSUBISHI ELECTRIC CORP
发明人
TAKASHIMA MASAHIKO;OZAKI TAKASHI
分类号
H01L21/82;G06F17/50
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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