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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02372(A)
申请公布日期
1990.01.05
申请号
JP19880154698
申请日期
1988.06.24
申请人
HITACHI LTD
发明人
KUME HITOSHI;YAMAMOTO HIDEAKI;TSUKADA TOSHIHISA;KAMIGAKI YOSHIAKI;ADACHI TETSUO;KURE TOKUO
分类号
H01L21/8247;G11C16/02;G11C16/04;G11C17/00;H01L29/78;H01L29/788;H01L29/792
主分类号
H01L21/8247
代理机构
代理人
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