发明名称 SEMICONDUCTOR DEVICE
摘要 <p>PURPOSE:To obtain a semiconductor device using a bipolar transistor by a method wherein, according to a base potential, a base current can be flowed in a reverse direction in addition to a base current in a forward direction. CONSTITUTION:An N<+> type buried layer 22, an epitaxial silicon layer 23, an N-type well 24 and a field oxide film 25 are formed on the surface of a P<-> type silicon substrate 21. A collector extraction layer 26, a P<-> type base region 27, an N<+> type emitter region 28, an emitter polycide 29 and a P<+> type layer 30 are formed at opening parts; in addition, an N<+> type layer 31 are piled up on the surface of the collector extraction layer 26. This whole assembly is covered with a silicon oxide film 32; a collector electrode, a base electrode and an emitter electrode 35, 36, 37 composed of Al-Si 34 are formed at contact openings via a Ti/TiN film 33. Accordingly, a reverse base current, between the collector and the base, which is larger than a forward base current can flow according to a change in a base potential. Thereby, it is possible to realize a transistor whose base current has a negative region in addition to a conventional positive region.</p>
申请公布号 JPH021129(A) 申请公布日期 1990.01.05
申请号 JP19880158189 申请日期 1988.06.28
申请人 TOSHIBA CORP 发明人 SAKUI YASUSHI;HASEGAWA TAKEHIRO;WATANABE SHIGEYOSHI;MASUOKA FUJIO
分类号 H01L29/73;H01L21/331;H01L21/8222;H01L21/8249;H01L27/06;H01L27/08;H01L27/082;H01L29/72;H01L29/732;H03K3/286;H03K3/2893;H03K5/08;H03K17/60;H03K19/08;H03K19/082 主分类号 H01L29/73
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