METHOD OF DIFFUSION,申请号JP19880142123-传众专利搜索

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发明名称	METHOD OF DIFFUSION
摘要
申请公布号	JPH021118(A)	申请公布日期	1990.01.05
申请号	JP19880142123	申请日期	1988.06.09
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	NOMURA NOBORU;KAWAKITA KENJI;HASHIMOTO KAZUHIKO;KOIZUMI TAICHI
分类号	H01L21/263;H01L21/265	主分类号	H01L21/263
代理机构		代理人
主权项
地址

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