METHOD OF SIMULTANEOUSLY MEASURING THICKNESS AND COMPOSITION OF FILM AND APPARATUS THEREFOR

摘要

A film (8) as being a subject to be measured is irradiated by an X-ray (13) from a single X-ray source (12), whereby the intensity of the diffracted X-ray of a crystalline substance contained in the film and the intensity of the fluorescent X-ray of an element composing the film are simultaneously detected by at least two X-ray intensity detectors (14C, 14A), respectively, so that the thickness and composition of the film at the same position are simultaneously determined from the both detected values.