Purification process for hydrogen peroxide

摘要

To reduce the impurities by a factor of from 100 to 1000, in a purification process for hydrogen peroxide the metal ions present in the hydrogen peroxide solution are first converted into anionic complexes using polydentate ligands and the hydrogen peroxide solution is then treated with anion exchangers. The process is used in semiconductor technology, in particular in the production of highly integrated data storage circuits (memory circuits).