Device for coating an elongate interior of a hollow body with a diamond-like hard carbon coating by means of a plasma-assisted CVD process

摘要

A device for coating an inner wall of an elongate hollow body with a diamond-like hard carbon coating by means of a plasma-assisted CVD process is described, wherein a relatively high ion density of the process gas is created in order to obtain high deposition rates in the interior. The interior leads into a plasma chamber of a vacuum vessel, in which likewise a plasma can burn and where the process conditions usual for plasma-assisted CVD processes are maintained. The invention is used in particular for the coating of the inner walls of pipes at high deposition rates, it also being possible for the pipes to be closed at one end.