发明名称 ORTHOGONAL AXIS DEVICE WITH LINEAR MOTORS FOR POSITIONING AND PROCESSING WORKPIECES, IN PARTICULAR FOR BONDING WIRES ONTO ELECTRONIC COMPONENTS
摘要 A device for positioning and processing workpieces, in particular for bonding wires onto electronic components, with movement along two orthogonal axes (X-Y) on which there lie two non-superposed components (1, 2) of the processing machine, the first component (1), positioned along an X-axis, comprising means (3, 14, 15, 16) for supporting and clamping a workpiece (24) while operating thereon, whereas the second component (2), positioned along a Y-axis, carries an operating head (4). Said means (3, 14, 15, 16) for clamping and supporting the workpiece also form the workpiece feed mechanism and are rigid partly with the first component (1) and partly with a mobile member (6) forming part of said first component (1). Said mobile member (6) carries a coil (9) forming the armature of a linear motor, the stator (10, 11) of which, rigid with the external structure of said first component (1), comprises permanent magnets (10) positioned to the side of the coil (9). Said mobile member (6) is supported pneumatically by stationary pneumostatic shoes (7). A position sensor is also provided for controlling the moving parts, the sensor allowing bonding to be programmed for execution at different pitches on components of different dimensions, and at different points.
申请公布号 EP0287786(A3) 申请公布日期 1990.01.03
申请号 EP19880103186 申请日期 1988.03.02
申请人 SCAVINO, MARIO 发明人 SCAVINO, MARIO
分类号 H01L21/60;H01L21/00 主分类号 H01L21/60
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