| 摘要 |
<p>A microwave reactive gas generator (10) including a microwave power source (14) with a waveguide (12) coupled to the power source (14) for transmitting microwave radiation. A cavity (22) for establishing a microwave mode is attached to the waveguide (12), and there is a passage tube (24) through the cavity (22) transverse to the direction of propagation of the microwave radiation in the waveguide (12) for passing the gas to be excited through the cavity (22). The generator (10) also includes a device (16, 18, 20) for matching the impedance of the load to the microwave power source. The cavity (22) couples the microwave power from the waveguide (12) to the passage tube (24) to energize the gas into a reactive state.</p> |
